KINETIC REGULARITIES OF POLYCARBONATE ETCHING IN OXYGEN AND AIR PLASMA
Abstract
Kinetics of etching of cast polycarbonate in the positive column of a DC glow discharge in a flow of oxygen and air were studied at the current range of 20-110 mA and pressure range of 50-300 Pa at different degrees of reactor loading with polymer. The mass loss rates, activation energies of etching process and surface energies were determined. The composition of surface functional groups was obtained by FTIR ATR method and surface morphology was characterized by AFM.
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