Kaziev, A. V., Kolodko, D. V., Tumarkin, A. V., Kharkov, M. M. and Lisenkov, V. Y. (2023) “SIMULATION OF TARGET SURFACE CHEMICAL STATE IN A HOT-TARGET HIPIMS PROCESS”, ChemChemTech, 66(12), pp. 76-81. doi: 10.6060/ivkkt.20236612.6879.