Kaziev, Andrey V., Dobrynya V. Kolodko, Alexander V. Tumarkin, Maksim M. Kharkov, and Vladislav Yu. Lisenkov. “SIMULATION OF TARGET SURFACE CHEMICAL STATE IN A HOT-TARGET HIPIMS PROCESS”. ChemChemTech 66, no. 12 (November 8, 2023): 76-81. Accessed May 20, 2024. http://ctj-isuct.ru/article/view/5016.