Efremov, A. M., Murin, D. B. and Kwon, K. H. (2018) “PLASMA PARAMETERS AND ACTIVE SPECIES KINETICS IN CF4+C4F8+Ar GAS MIXTURE”, ChemChemTech, 61(4-5), pp. 31-36. doi: 10.6060/tcct.20186104-05.5695.