Efremov, Alexander M., Dmitriy B. Murin, and Kwang H. Kwon. “PLASMA PARAMETERS AND ACTIVE SPECIES KINETICS IN CF4+C4F8+Ar GAS MIXTURE”. ChemChemTech 61, no. 4-5 (April 17, 2018): 31-36. Accessed June 4, 2025. https://ctj-isuct.ru/article/view/330.