PROPERTIES OF NITROGEN-DOPED AMORPHOUS CARBON COATINGS OBTAINED BY IMPULSE VACUUM-ARC METHOD
Abstract
The paper presents results of the research of the structure and properties of nitrogen-doped amorphous carbon coatings obtained in the vacuum from the flow of pulsed carbon plasma. The doping by nitrogen of carbon coating was determined to lead to increases in electrical conductivity, reductions of internal stresses, reduce of density, hardness and modulus, and to the change in structure, surface morphology and tribological characteristics.
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