СРАВНИТЕЛЬНОЕ ИССЛЕДОВАНИЕ ПАРАМЕТРОВ И СОСТАВА ПЛАЗМЫ В СМЕСЯХ CF4, Cl2 И HBr + Ar
Аннотация
В данной работе обсуждаются электрофизические параметры и химия плазмы в системах CF4 + Ar, Cl2 + Ar и HBr + Ar при одинаковых условиях возбуждения разряда. Исследования проводились методами диагностики плазмы зондами Лангмюра и моделирования плазмы в условиях планарного индукционного плазмохимического реактора при постоянном давлении газа (10 мТор), вкладываемой мощности (800 Вт) и мощности смещения (300 Вт), но при варьируемой (0-80%) доле Ar в плазмообразующей смеси. Основное внимание уделялось параметрам, определяющим стационарные концентрации активных частиц плазмы (температура электронов, концентрация электронов, константы скоростей реакций под действием электронного удара) и кинетику гетерогенных ионно-стимулированных химических реакций (потоки атомов галогенов, энергия ионной бомбардировки, поток энергии ионов).
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